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Micro Equipment
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micro equipment

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micro equipment
-The MICRO system receives information on defects from the AOI system and automatically finds defect locations. Then the operator judges defects using a powerful microscope optical system.
-This system also is a basic FPD system which can measure and repair by attaching important units, such as the beam measurement unit, the spectrum measurement unit and repair unit, with potion.
-As glass becomes larger, the type of the MICRO system changes from stage fixing type of gantry type to measurement unit relocation, such as X-axis board move, Y-axis optical system, to air-rise stage type which is each operation type.